Wafer flatness detection
Industry pain points and demands
The lack of smoothness of wafers will lead to the change of thermal stress in the packaging process, which will affect the normal use of chips, so the requirements for the surface finish of wafers are very high. It adopts deep vision intelligent high-precision displacement sensor SG5000 series, supports specular reflection type installation, and can judge the flatness by multi-point values on the wafer.
Advantages & characteristics
01
The SG series has a maximum sampling frequency of 590kHz
02
The static repetition accuracy is 0.02μm
03
Bright automatic adjustment, suitable for various detection environment
Camera Selection
| Model number | SG5020/SG5025 | ||
| Reference distance (CD) | 20mm | ||
| Measuring range | -3mm~3mm | ||
| Light source | Light source wavelength | 655nm | |
| Laser class | Class 2 | ||
| Laser output power | 5mW | ||
| Spot diameter (spot size) | Speck of light | Φ 45 microns | |
| Wide spot | 45 * 400 microns | ||
Repetition accuracy ① | 0.02 mu m | ||
| linearity | ±0.02% of F.S. | ||
| Temperature characteristic | 0.01% F.S./℃ | ||
| Sampling frequency (Hz) | 1/2/5/10/20/50 KHZ / 88/200/400/590 (optional 10 level) | ||
| Input/output | Communication port | One 100Base-TX/1000Base-T Ethernet interface, one RS232 | |
| Analog output | 1 analog output, support analog voltage and analog current switching | ||
| Encoder input | 1 group difference encoder | ||
| IO input | 14, support timing, zero, reset, laser control, formula switching and other functions | ||
| IO output | 16 channels, determine the status output | ||
| Storage temperature | -20 ~ 70℃ | ||
| Operating temperature | 0 ~ 50 ° C | ||
| Working humidity | 35% to 85% no condensation | ||
| EFT protection | Power port 2kV/5 or 100kHz, signal port 1kV/5 or 100kHz, in accordance with IEC 61000-4-4 standards | ||
| ESD protection | Contact discharge is 4kV and air discharge is 8kV, in line with IEC 61000-4-2 standards | ||
| Vibration | 10Gs (10-500Hz), compliant with IEC 68-2-6 Fc standard | ||
| Impact | 50Gs/3ms per axis, in accordance with IEC 68-2-27 Ea standard | ||
| IP level | IP67, in accordance with IEC 60529 standard | ||
| Size (mm) | 60*61*41 | ||
| Data cable (wiring) model | SCB-GICAM-HA2-3m/5m/10m | ||
| Weight (including cables) | 324g | ||