Brief description of 3D profiler
The 3D optical profiler is a non-contact optical instrument with dual LED light sources, which basically does not damage the sample. Different measurement modes are selected depending on the sample. The phase-shift interference mode (PSI) is mainly used to measure the roughness of smooth surfaces, and vertical scanning interference Mode (VSI) can measure height, width, radius of curvature, roughness, etc.
The 3D optical profiler is a non-contact and non-destructive three-dimensional measurement instrument with convenient use, excellent performance and high cost performance. The ninth generation system adopts the unique dual-LED lighting source ZL technology, which can better detect ultra-smooth surfaces. and very rough surfaces, it can measure from sub-nanometer roughness to millimeter step heights. Easy-to-use operation, fast data acquisition, powerful software functions, and Angstrom-level reproducibility. At the same time, the optional X-Y automatic platform makes it have the function of programmed sample processing.