3d optical profiler working principle
The light emitted by the light source is divided into two beams after being expanded and collimated by a beam splitter prism. One beam is reflected by the surface to be measured, and the other beam is reflected by the reference mirror. The two reflected beams finally converge and interfere, and the microscope will be measured. The topographic features of the surface are converted into interference fringe signals, and the three-dimensional topography of the surface is measured by measuring the changes of the interference fringes.
The 3D topography map combined with the chromatogram is very intuitive, but the horizontal test range and vertical height scale are also critical. In ultra-precision machining, 3D AOI (Automatic Optical Inspection) is an upgrade to traditional precision machining, making up for some defects in traditional AOI due to 2D imaging principles, and improving equipment performance to meet the quality and product availability of major electronics factories. double requirement. The working principle of the 3D optical profiler is developed and produced based on the principle of white light interference. It can non-destructively detect precision machined surfaces in a non-contact way. The detection results are displayed in the form of a 3D data map, which can intuitively display the surface texture characteristics.